Inventor · San Diego, CA, US

Yang Yang

62Patents
6h-index
67Co-inventors
71Inventor score

Filing activity: Mar 14, 2013 → Apr 5, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US10707086B2 Etching methods Electricity 36 Active
US8734664B2 Method of differential counter electrode tuning in an RF plasma reactor Electricity 23 Active
US10544505B2 Deposition or treatment of diamond-like carbon in a plasma reactor Electricity 14 Active
US10249495B2 Diamond like carbon layer formed by an electron beam plasma process Electricity 13 Active
US11476090B1 Voltage pulse time-domain multiplexing Electricity 10 Active
US9161428B2 Independent control of RF phases of separate coils of an inductively coupled plasma reactor Electricity 7 Active
US9613783B2 Method and apparatus for controlling a magnetic field in a plasma chamber Electricity 5 Active
US11043372B2 High-density low temperature carbon films for hardmask and other patterning applications Electricity 4 Active
US11043375B2 Plasma deposition of carbon hardmask Electricity 4 Active
US10475626B2 Ion-ion plasma atomic layer etch process and reactor Electricity 3 Active
US10115566B2 Method and apparatus for controlling a magnetic field in a plasma chamber Electricity 3 Active
US9449794B2 Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna Electricity 3 Active
US10017857B2 Method and apparatus for controlling plasma near the edge of a substrate Electricity 2 Active
US11651966B2 Methods and apparatus for processing a substrate Electricity 2 Active
US12020901B2 RF impedance matching networks for substrate processing platform Electricity 1 Active
US11043387B2 Methods and apparatus for processing a substrate Electricity 1 Active
US10818472B2 Methods of optical device fabrication using an electron beam apparatus Electricity 1 Active
US11967483B2 Plasma excitation with ion energy control Electricity 1 Active
US11469097B2 Carbon hard masks for patterning applications and methods related thereto Electricity 1 Active
US11448977B1 Gas distribution plate with UV blocker at the center Electricity 1 Active
US11721525B2 Sensorless RF impedance matching network Electricity 1 Active
US10167560B2 Method and apparatus for structural coloration of metallic surfaces Chemistry; Metallurgy 1 Active
US10153139B2 Multiple electrode substrate support assembly and phase control system Electricity 1 Active
US10957518B2 Chamber with individually controllable plasma generation regions for a reactor for processing a workpiece Electricity 1 Active
US11823868B2 Hardware switch on main feed line in a radio frequency plasma processing chamber Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.