Testing system
US11454664B2 · kind B2 · utility
0Cited by
6References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 16, 2018 |
| Grant date | Sep 27, 2022 |
| Priority date | — |
| Expiry date | Sep 8, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67178
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A testing system includes: an inspection module including a plurality of levels of inspection chambers in each of which a tester part having a tester configured to perform an electrical inspection of an inspection object and a probe card is accommodated; an aligner module configured to align the inspection object with the tester part; an alignment area in which the aligner module is accommodated; and a loader part configured to load the inspection object into the alignment area and unload the inspection object out of the aligner module, wherein the inspection module is located adjacent to the alignment area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.