Tunable extraction assembly for wide angle ion beam
US11495430B2 · kind B2 · utility
0Cited by
8References
13Claims
0Family size
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Key dates
| Filing date | Jul 15, 2020 |
| Grant date | Nov 8, 2022 |
| Priority date | — |
| Expiry date | Jun 15, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/3151
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An ion beam processing system including a plasma chamber, a plasma plate, disposed alongside the plasma chamber, the plasma plate defining a first extraction aperture, a beam blocker, disposed within the plasma chamber and facing the extraction aperture, a blocker electrode, disposed on a surface of the beam blocker outside of the plasma chamber, and an extraction electrode disposed on a surface of the plasma plate outside of the plasma chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.