Fluid sensor including an optical filter and a waveguide, and method for manufacturing the fluid sensor

US11506599B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Thomas Grille · Villach, AT
• Cristina Consani · Villach, AT
• Peter Irsigler · Ried im Innkreis, AT
• Bernhard Jakoby · Linz, AT
• Thomas Ostermann · Velden am Wörther See, AT
• Gerald Puehringer · Linz, AT
• Christian Ranacher · Lienz, AT
• Andreas Tortschanoff · Villach, AT

Key dates

• Filing date: Mar 25, 2020
• Grant date: Nov 22, 2022
• Expiry date: Apr 14, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2201/0833
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A fluid sensor includes a substrate having a top main surface region, wherein the top main surface region of the substrate forms a common system plane of the fluid sensor, a thermal radiation emitter on the top main surface region of the substrate, an optical filter structure on the top main surface region of the substrate, a waveguide on the main top surface region of the substrate, and a thermal radiation detector on the top main surface region of the substrate, wherein the thermal radiation detector provides a detector output signal based on a radiation strength of the filtered thermal radiation received from the waveguide.