Patent · US Active

In-situ method and apparatus for measuring fluid resistivity

US11555730B2 · kind B2 · utility

0Cited by

4References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Douglas A. Buchberger, Jr. · Livermore, US
Gautam Pisharody · Newark, US
Lancelot HUANG · San Jose, US

Key dates

Filing date	Oct 9, 2020
Grant date	Jan 17, 2023
Priority date	—
Expiry date	Dec 4, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG01F25/13
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method and apparatus for determining particle contamination of a process fluid is disclosed herein. In one example, a fluid resistivity measurement probe is provided. The system includes an upstream fluid conduit, a downstream fluid conduit, and a measuring section. The measuring section has a metal rod, and a ground electrode. The ground electrode surrounds and is coaxial with the metal rod. The upstream fluid conduit is coupled to a first end of the ground electrode. The downstream fluid conduit is coupled to a second end of the ground electrode. The metal rod and the ground electrode define a space therebetween. The space flows a fluid from the upstream fluid conduit to the downstream fluid conduit.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.