Gautam Pisharody
4Patents
1h-index
13Co-inventors
37Inventor score
Filing activity: Nov 23, 2016 → Apr 5, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10879094B2 | Electrostatic chucking force measurement tool for process chamber carriers | Electricity | 1 | Active |
| US11555730B2 | In-situ method and apparatus for measuring fluid resistivity | Physics | 0 | Active |
| US11609505B2 | Apparatus and methods for verification and re-use of process fluids | Physics | 0 | Active |
| US12112972B2 | Rotating biasable pedestal and electrostatic chuck in semiconductor process chamber | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.