Vapor deposition of molybdenum using a bis(alkyl-arene) molybdenum precursor

US11560625B2 · kind B2 · utility

Assignee

• ENTEGRIS, INC. · US

Inventors

• Robert Wright, Jr. · Newtown, US
• Shuang Meng · Austin, US
• Bryan C. Hendrix · Danbury, US
• Thomas H. Baum · New Fairfield, US
• Philip S. H. Chen · Bethel, US

Key dates

• Filing date: Jan 11, 2019
• Grant date: Jan 24, 2023
• Expiry date: Feb 1, 2039

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/32
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Described are vapor deposition methods for depositing molybdenum materials onto a substrate by the use of bis(alkyl-arene) molybdenum, also referred to herein as (alkyl-arene)2Mo, for example bis(ethyl-benzene) molybdenum ((EtBz)2Mo), as a precursor for such deposition, as well as structures that contain the deposited material.