Resonator, linear accelerator configuration and ion implantation system having toroidal resonator
US11596051B2 · kind B2 · utility
2Cited by
27References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2020 |
| Grant date | Feb 28, 2023 |
| Priority date | — |
| Expiry date | Jun 1, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H2007/222
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus may include a drift tube assembly, arranged to transmit an ion beam. The drift tube assembly may include a first ground electrode; an RF drift tube assembly, disposed downstream of the first ground electrode; and a second ground electrode, disposed downstream of the RF drift tube assembly. The RF drift tube assembly may define a triple gap configuration. The apparatus may include a resonator, where the resonator comprises a toroidal coil, having a first end, connected to a first RF drift tube of the RF drift tube assembly, and a second end, connected to a second RF drift tube of the RF drift tube assembly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.