Patent · US Active

Stackable fully molded semiconductor structure with through silicon via (TSV) vertical interconnects

US11616003B2 · kind B2 · utility

0Cited by
1References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 15, 2022
Grant dateMar 28, 2023
Priority date
Expiry dateJun 15, 2042

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2225/1058
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device may include an embedded device comprising through silicon vias (TSVs) extending from a first surface to a second surface opposite the first surface, wherein the embedded device comprises an active device, a semiconductor die comprising an active surface formed at the first surface, an integrated passive device (IPD), or a passive device. Encapsulant may be disposed over at least five sides of the embedded device. A first electrical interconnect structure may be coupled to a first end of the TSV at the first surface of the embedded device, and a second electrical interconnect structure may be coupled to a second end of the TSV at the second surface of the embedded device. A semiconductor die (e.g. a system on chip (SoC), memory device, microprocessor, graphics processor, or analog device), may be mounted over the first electrical interconnect of the TSV.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.