Patent · US Active

Ion source with single-slot tubular cathode

US11631567B2 · kind B2 · utility

0Cited by

8References

18Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Bon-Woong Koo · Andover, US
Frank Sinclair · Quincy, US
Alexandre Likhanskii · Malden, US
Svetlana B. Radovanov · Marblehead, US
Alexander S. Perel · Danvers, US
Graham Wright · Newburyport, US
Jay T. Scheuer · Rowley, US
Daniel R. Tieger · Gloucester, US
You Chia Li · Reading, US
Jay Johnson · Gloucester, US
Tseh-Jen Hsieh · Rowley, US
Ronald F. Johnson · Gloucester, US

Key dates

Filing date	Aug 20, 2021
Grant date	Apr 18, 2023
Priority date	—
Expiry date	Dec 7, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/31701
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An ion source including a chamber housing defining an ion source chamber and including an extraction plate on a front side thereof, the extraction plate having an extraction aperture formed therein, and a tubular cathode disposed within the ion source chamber and having an opening formed in a front half thereof nearest the extraction aperture, wherein a rear half of the tubular cathode furthest from the extraction aperture is closed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.