Processing of workpieces using fluorocarbon plasma
US11651977B2 · kind B2 · utility
0Cited by
6References
19Claims
0Family size
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Key dates
| Filing date | Mar 30, 2021 |
| Grant date | May 16, 2023 |
| Priority date | — |
| Expiry date | May 8, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/334
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Methods for processing a workpiece are provided. Conducting a thermal treatment on a workpiece are provided. The workpiece contains at least one layer of metal. The method can include generating one or more species from a process gas. The process gas can include hydrogen or deuterium. The method can include filtering the one or more species to create a filtered mixture and exposing the workpiece to the filtered mixture. An oxidation process on a workpiece are provided. The method can be conducted at a process temperature of less than 350° C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.