Bode fingerprinting for characterizations and failure detections in processing chamber
US11693053B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 22, 2022 |
| Grant date | Jul 4, 2023 |
| Priority date | — |
| Expiry date | Aug 22, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32935
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A non-transitory computer-readable storage medium stores instructions, which when executed by a processing device of a diagnostic server, cause the processing device to perform certain operations. The operations include receiving, from a processing chamber, (i) measurement values of a combined signal that is based on an injection of an alternating signal wave onto a first output signal of a controller of the processing chamber, and (ii) measurement values of a second output signal of the controller that incorporates feedback from the processing chamber. The operations further include generating, based on the measurement values of the combined signal and the measurement values of the second output signal of the controller, a baseline bode fingerprint pertaining to a state associated with the processing chamber. The operations further include storing, in computer storage, the baseline bode fingerprint to be used in performing diagnostics of the processing chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.