Image enhancement for multi-layered structure in charged-particle beam inspection
US11694312B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 5, 2021 |
| Grant date | Jul 4, 2023 |
| Priority date | — |
| Expiry date | Dec 18, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2817
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
An improved method and apparatus for enhancing an inspection image in a charged-particle beam inspection system. An improved method for enhancing an inspection image comprises acquiring a first image and a second image of multiple stacked layers of a sample that are taken with a first focal point and a second focal point, respectively, associating a first segment of the first image with a first layer among the multiple stacked layers and associating a second segment of the second image with a second layer among the multiple stacked layers, updating the first segment based on a first reference image corresponding to the first layer and updating the second segment based on a second reference image corresponding to the second layer, and combining the updated first segment and the updated second segment to generate a combined image including the first layer and the second layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.