Inventor · San Jose, CA, US

Lingling PU

13Patents
2h-index
19Co-inventors
43Inventor score

Filing activity: May 19, 2016 → Aug 3, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US11216938B2 Systems and methods of optimal metrology guidance Electricity 6 Active
US11126089B2 Method for determining corrections to features of a mask Physics 4 Active
US11527405B2 In-die metrology methods and systems for process control Electricity 1 Active
US11842420B2 Method and apparatus for adaptive alignment Physics 0 Active
US11694312B2 Image enhancement for multi-layered structure in charged-particle beam inspection Electricity 0 Active
US9884888B2 Chemical regeneration method of oxidized coenzyme NAD (P)+ Emerging Cross-Sectional Technologies 0 Active
US12040187B2 In-die metrology methods and systems for process control Electricity 0 Active
US11769317B2 Fully automated SEM sampling system for e-beam image enhancement Physics 0 Active
US12191112B2 System and method for defect inspection using voltage contrast in a charged particle system Electricity 0 Active
US12230013B2 Fully automated SEM sampling system for e-beam image enhancement Physics 0 Active
US12080513B2 Cross-talk cancellation in multiple charged-particle beam inspection Electricity 0 Active
US11308635B2 Method and apparatus for adaptive alignment Physics 0 Active
US11756187B2 Systems and methods of optimal metrology guidance Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.