Patent · US Active

Sensor device including sensor unit for a gaseous medium

US11774308B2 · kind B2 · utility

0Cited by

0References

20Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Rainer Leuschner · Regensburg, DE
Kerstin Kaemmer · Radebeul, DE
Roland Meier · Holzwickede, DE
Marten Oldsen · Kleve, DE
Karolina Zogal · Regensburg, DE

Key dates

Filing date	Sep 17, 2020
Grant date	Oct 3, 2023
Priority date	—
Expiry date	May 22, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG01N33/0027
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A sensor device includes a sensor unit sensitive for a property of a gaseous medium. The sensor unit is formed on a first surface of a sensor substrate. A frame structure on the first surface includes a first loop portion laterally surrounding a first area that includes the sensor unit. A communicating channel accesses the first area through at least one of a lateral port in the first loop portion and a base port in the sensor substrate. A lid structure completely covers the frame structure and the first area.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.