Patent · US Active

Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment

US11796085B2 · kind B2 · utility

1Cited by

19References

15Claims

0Family size

Assignee

Lam Research Corporation · US

Inventors

Mariusch Gregor · Gilroy, US
Theodoros Panagopoulos · Los Gatos, US
Thorsten Lill · Santa Clara, US

Key dates

Filing date	Jul 23, 2020
Grant date	Oct 24, 2023
Priority date	—
Expiry date	Jul 23, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67017
WIPO fieldMechanical elements
WIPO sectorMechanical engineering

Abstract

An apparatus may be provided that includes a substrate having one or more microfluidic valve structures. The valve structures are non-elastomeric, non-polymeric, non-metallic membrane valves for use in high-vacuum application. Such valves are functional even when the fluid-control side of the valve is exposed to a sub-atmospheric pressure field which may generally act to collapse/seal traditional elastomeric membrane valve.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.