Patent · US Active

Resonator, linear accelerator configuration and ion implantation system having rotating exciter

US11812539B2 · kind B2 · utility

2Cited by

12References

19Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Costel Biloiu · Rockport, US
David Blahnik · Round Rock, US
Wai-Ming Tam · Manchester-by-the-Sea, US
Charles T. Carlson · Cedar Park, US
Frank Sinclair · Quincy, US

Key dates

Filing date	Oct 20, 2021
Grant date	Nov 7, 2023
Priority date	—
Expiry date	Feb 17, 2042

Classification

Technology area (CPC H)Electricity
CPC primaryH05H2277/12
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

An exciter for a high frequency resonator. The exciter may include an exciter coil inner portion, extending along an exciter axis, an exciter coil loop, disposed at a distal end of the exciter coil inner portion. The exciter may also include a drive mechanism, including at least a rotation component to rotate the exciter coil loop around the exciter axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.