Vaporization vessel and method

US11821087B2 · kind B2 · utility

Assignee

• ENTEGRIS, INC. · US

Inventors

• Bryan C. Hendrix · Danbury, US
• Scott L. Battle · Cedar Park, US
• David James Eldridge · Seward Junction, US
• John N. Gregg · Marble Falls, US
• Jacob Thomas · Sugar Land, US
• Manuel F. Gonzales · Fort Worth, US
• Kenney R. Jordan · Denton, US
• Benjamin H. Olson · Round Rock, US

Key dates

• Filing date: Apr 23, 2020
• Grant date: Nov 21, 2023
• Expiry date: Oct 15, 2040

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/02271
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A tray for a vaporization vessel that includes a tray having a side wall, a bottom plate, one or more apertures that extend through the bottom plate, and a duct that extends through and from the bottom plate. The tray configured to support a solid reagent to be vaporized. A method of assembling the tray that includes forming a first tray that has the side wall and the bottom plate. A vaporization vessel that includes one or more of the trays.