Heated pedestal design for improved heat transfer and temperature uniformity

US11830706B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Venkata Sharat Chandra Parimi · Sunnyvale, US
• Zubin Huang · Santa Clara, US
• Jian Li · Fremont, US
• Satish Radhakrishnan · San Jose, US
• Rui Cheng · San Jose, US
• Diwakar Kedlaya · San Jose, US
• Juan Carlos Rocha-Alvarez · Redwood City, US
• Umesh M. Kelkar · Santa Clara, US
• Karthik Janakiraman · San Jose, US
• Sarah Michelle Bobek · Santa Clara, US
• Prashant Kumar Kulshreshtha · San Jose, US
• Vinay Prabhakar · Cupertino, US
• Byung Seok KWON · San Jose, US

Key dates

• Filing date: Dec 4, 2019
• Grant date: Nov 28, 2023
• Expiry date: Sep 3, 2042

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/3321
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Embodiments of the present disclosure generally relate to a pedestal for increasing temperature uniformity in a substrate supported thereon. The pedestal comprises a body having a heater embedded therein. The body comprises a patterned surface that includes a first region having a first plurality of posts extending from a base surface of the body at a first height, and a second region surrounding the central region having a second plurality of posts extending from the base surface at a second height that is greater than the first height, wherein an upper surface of each of the first plurality of posts and the second plurality of posts are substantially coplanar and define a substrate receiving surface.