Inventor · Cupertino, CA, US

Vinay Prabhakar

31Patents
4h-index
59Co-inventors
62Inventor score

Filing activity: Dec 8, 2009 → May 26, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US8172992B2 Wafer electroplating apparatus for reducing edge defects Chemistry; Metallurgy 21 Active
US9324598B2 Substrate processing system and method Emerging Cross-Sectional Technologies 6 Active
US9318332B2 Grid for plasma ion implant Emerging Cross-Sectional Technologies 4 Active
US11670492B2 Chamber configurations and processes for particle control Electricity 4 Active
US9543114B2 Implant masking and alignment system with rollers Electricity 3 Active
US10276364B2 Bevel etch profile control Electricity 3 Active
US9875922B2 Substrate processing system and method Emerging Cross-Sectional Technologies 2 Active
US11584994B2 Pedestal for substrate processing chambers Electricity 1 Active
US10629427B2 Bevel etch profile control Electricity 1 Active
US11600470B2 Targeted heat control systems Electricity 1 Active
US12266550B2 Multiple process semiconductor processing system Electricity 0 Active
US11984305B2 Substrate pedestal for improved substrate processing Electricity 0 Active
US11515176B2 Thermally controlled lid stack components Electricity 0 Active
US10923334B2 Selective deposition of hardmask Electricity 0 Active
US11875969B2 Process chamber with reduced plasma arc Electricity 0 Active
US11532463B2 Semiconductor processing chamber and methods for cleaning the same Electricity 0 Active
US11569072B2 RF grounding configuration for pedestals Electricity 0 Active
US12211728B2 Electrostatic chuck design with improved chucking and arcing performance Electricity 0 Active
US9583661B2 Grid for plasma ion implant Emerging Cross-Sectional Technologies 0 Active
US10599043B2 Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components Electricity 0 Active
US11560623B2 Methods of reducing chamber residues Chemistry; Metallurgy 0 Active
US11587773B2 Substrate pedestal for improved substrate processing Electricity 0 Active
US12191115B2 Dual RF for controllable film deposition Electricity 0 Active
US12424414B2 Semiconductor processing system with a manifold for equal splitting and common divert architecture Electricity 0 Active
US11515129B2 Radiation shield modification for improving substrate temperature uniformity Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.