Inventor · Fremont, CA, US

Jian Li

36Patents
3h-index
105Co-inventors
62Inventor score

Filing activity: Oct 8, 2008 → May 5, 2025

Most-cited inventions

PatentTitleAreaCited byStatus
US8101906B2 Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers Electricity 8 Active
US8481433B2 Methods and apparatus for forming nitrogen-containing layers Electricity 6 Active
US8546273B2 Methods and apparatus for forming nitrogen-containing layers Electricity 3 Active
US11852410B2 Back-blowing unblocking device for dustproof screen of dryer, dustproof equipment, and dryer Mechanical Engineering; Lighting; Heating 2 Active
US9865438B2 Method and apparatus for calibrating optical path degradation useful for decoupled plasma nitridation chambers Electricity 2 Active
US11499229B2 Substrate supports including metal-ceramic interfaces Electricity 1 Active
US11594440B2 Real time bias detection and correction for electrostatic chuck Electricity 1 Active
US12057339B2 Bipolar electrostatic chuck to limit DC discharge Electricity 1 Active
US11584994B2 Pedestal for substrate processing chambers Electricity 1 Active
US11587817B2 High temperature bipolar electrostatic chuck Electricity 1 Active
US11981998B2 Systems and methods for substrate support temperature control Electricity 1 Active
US11699602B2 Substrate support assemblies and components Electricity 1 Active
US11808639B2 High-precision temperature demodulation method oriented toward distributed fiber Raman sensor Physics 0 Active
US11830706B2 Heated pedestal design for improved heat transfer and temperature uniformity Electricity 0 Active
US12131934B2 Semiconductor substrate support leveling apparatus Electricity 0 Active
US12421607B2 Systems and methods for substrate support temperature control Electricity 0 Active
US12300474B2 Semiconductor substrate support power transmission components Electricity 0 Active
US11901209B2 High temperature bipolar electrostatic chuck Electricity 0 Active
US12099897B2 Image processing for scanning devices based on laser aimer position Physics 0 Active
US12040210B2 Multi-pressure bipolar electrostatic chucking Electricity 0 Active
US9490326B2 Wafer formed by slicing an ingot Emerging Cross-Sectional Technologies 0 Active
US12258703B2 Method for preparation of plasma-treated nanofiber-based hydrogen gas sensing material Textiles; Paper 0 Active
US11573322B2 Laser speed measuring method, control device and laser velocimeter Physics 0 Active
US12080584B2 Real time bias detection and correction for electrostatic chuck Electricity 0 Active
US11655144B2 Method for preparing micro-cavity array surface product with inclined smooth bottom surface based on air molding method Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.