Process for preparing ingot having reduced distortion at late body length
US11959189B2 · kind B2 · utility
0Cited by
18References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 3, 2020 |
| Grant date | Apr 16, 2024 |
| Priority date | — |
| Expiry date | Sep 4, 2040 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B30/04
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for growing a single crystal silicon ingot by the Czochralski method having reduced deviation in diameter is disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.