Endpoint detection system for enhanced spectral data collection
US11965798B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 10, 2021 |
| Grant date | Apr 23, 2024 |
| Priority date | — |
| Expiry date | Oct 10, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/4246
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An endpoint detection system for enhanced spectral data collection is provided. An optical bundle is coupled to a light source configured to generate incident light. The optical bundle includes two or more sets of optical fibers that each include an emitting optical fiber and a receiving optical fiber. The receiving optical fibers are disposed within the optical bundle at a pairing angle relative to a respective emitting optical fiber. The optical bundle is also coupled to a collimator assembly that includes an achromatic lens. The achromatic lens receives a first light beam of incident light from a first emitting optical fiber and directs spectral components of the first light beam to a first and second portion of a surface of a substrate. The first portion of the substrate surface is substantially the same as the second portion. The achromatic lens collects reflected spectral components that are produced by the spectral components directed to the first and second portions of the substrate surface. The achromatic lens transmits the reflected spectral components to a first receiving fiber of the optical fiber bundle, which transmits the reflected spectral components to a light dete…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.