Seal mechanism for load port doors
US11993978B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 1, 2022 |
| Grant date | May 28, 2024 |
| Priority date | — |
| Expiry date | Sep 27, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67155
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The disclosure describes devices and systems for a seal, and methods for using said seal. A seal includes a base portion configured to couple to a groove formed by an edge surface of a first component. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create an airtight seal between the first component and a sealing surface of a second component responsive to a threshold sealing force being applied against the sealing portion. The seal further includes a retaining portion substantially perpendicular to the base portion. A surface of the retaining portion is configured to push against the edge surface of the first component responsive to the threshold sealing force being applied against the sealing portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.