Fluid transfer system in a charged particle system

US11996262B2 · kind B2 · utility

Assignee

• ASML NETHERLANDS B.V. · NL

Inventors

• Marcus Adrianus Van De Kerkhof · Helmond, NL
• Jing Zhang · Chongqing, CN
• Martijn Petrus Christianus Van Heumen · Santa Clara, US
• Patriek Adrianus Alphonsus Maria Bruurs · Heesboom, NL
• Erheng WANG · San Jose, US
• Vineet Sharma · Draper, US
• Makfir Sefa · San Jose, US
• Shao-Wei Fu · San Jose, US
• Simone Maria Scolari · Eindhoven, NL
• Johannes Andreas Henricus Maria Jacobs · Veldhoven, NL

Key dates

• Filing date: Feb 18, 2021
• Grant date: May 28, 2024
• Expiry date: Apr 7, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67288
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

Apparatuses, systems, and methods for transferring fluid to a stage in a charged particle beam system are disclosed. In some embodiments, a stage may be configured to secure a wafer, a chamber may be configured to house the stage; and a tube may be provided within the chamber to transfer fluid between the stage and outside of the chamber. The tube may include a first tubular layer of first material, wherein the first material is a flexible polymer; and a second tubular layer of second material, wherein the second material is configured to reduce permeation of fluid or gas through the tube. In some embodiments, a system may include a degasser system outside of the chamber, where the degasser system may be configured to remove gases from the transfer fluid before the transfer fluid enters the tube.