Reactor system including a gas distribution assembly for use with activated species and method of using same

US12006572B2 · kind B2 · utility

Assignee

• ASM IP Holding B.V. · NL

Inventors

• Xing Lin · West Babylon, US
• Peipei Gao · Tempe, US
• Prajwal Nagaraj · Tempe, US
• Mingyang Ma · Charlottesville, US
• Wentao Wang · Tallahassee, US
• Ion Hong Chao · Gilbert, US
• Alexandros T. Demos · Fremont, US
• Paul F. Ma · Santa Clara, US
• Hichem M'Saad · Santa Clara, US

Key dates

• Filing date: Oct 1, 2020
• Grant date: Jun 11, 2024
• Expiry date: May 17, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67754
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A reactor system including a gas distribution assembly and method of using the reactor system are disclosed. The gas distribution assembly includes a gas distribution device, a gas expansion area, and a showerhead plate downstream of the gas distribution device and the expansion area.