Patent · US Active

HEMT devices with reduced size and high alignment tolerance

US12068406B2 · kind B2 · utility

0Cited by
0References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 16, 2021
Grant dateAug 20, 2024
Priority date
Expiry dateFeb 2, 2043

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/257

Abstract

A High Electron Mobility Transistor (HEMT) includes a source, a drain, a channel layer extending between the source and the drain, a barrier layer formed in contact with the channel layer, and extending between the source and the drain, and a gate formed in contact with, and covering at least a portion of, the barrier layer. The gate has gate edge portions and a gate central portion, and dielectric spacers may be formed over the gate edge portions, with the dielectric spacers having a first width therebetween proximal to the gate, and a second width therebetween distal from the gate, where the second width is longer than the first width.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.