Patent · US Active

Thermally conductive slugs/active dies to improve cooling of stacked bottom dies

US12094800B2 · kind B2 · utility

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18Claims
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Assignee

Inventors

Key dates

Filing dateDec 19, 2019
Grant dateSep 17, 2024
Priority date
Expiry dateJul 20, 2042

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/15153
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Embodiments include semiconductor packages. A semiconductor package includes first and second bottom dies on a package substrate, first top dies on the first bottom die, and second top dies on the second bottom die. The semiconductor package includes thermally conductive slugs on the first bottom die and the second bottom die. The thermally conductive slugs are comprised of a high thermal conductive material. The thermally conductive slugs are positioned directly on outer edges of top surfaces of the first and second bottom dies, inner edges of the top surfaces of the first and second bottom dies, and/or a top surface of the package substrate. The high thermal conductive material of the thermally conductive slugs is comprised of copper, silver, boron nitride, or graphene. The thermally conductive slugs may have two different thicknesses. The semiconductor package may include an active die and/or an integrated heat spreader with the pedestals.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.