Deposition chamber system diffuser with increased power efficiency

US12136538B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Changling Li · Riverside, US
• Lai ZHAO · Campbell, US
• Gaku Furuta · Sunnyvale, US
• Soo Young Choi · Fremont, US
• Robin L. Tiner · Santa Cruz, US
• David Atchley · Livermore, US
• Ganesh CHANDRASEKARAN · Santa Clara, US

Key dates

• Filing date: Oct 19, 2021
• Grant date: Nov 5, 2024
• Expiry date: Jan 3, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67109
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A diffuser includes a front-side gradient surface formed from a diffuser block, a back-side gradient surface formed from the diffuser block, and opening structures formed from the front-side gradient surface to the back-side gradient surface. Each opening structure includes a conical opening having a first end along the front-side gradient surface and a second end corresponding to an apex at a depth within the diffuser block, and a cylindrical opening formed from the depth to the back-side gradient surface. The opening structures are arranged in rows including a first set of rows and a second set of rows alternately positioned along a length of the diffuser block.