Inventor · Fremont, CA, US

Soo Young Choi

178Patents
17h-index
194Co-inventors
89Inventor score

Filing activity: Jun 22, 1999 → Dec 19, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US6942753B2 Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition Chemistry; Metallurgy 741 Expired
US8083853B2 Plasma uniformity control by gas diffuser hole design Emerging Cross-Sectional Technologies 722 Expired
US8328939B2 Diffuser plate with slit valve compensation Electricity 715 Active
US6825134B2 Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flow Electricity 560 Expired
US8721791B2 Showerhead support structure for improved gas flow Electricity 485 Active
US8174400B2 Frequency monitoring to detect plasma process abnormality Electricity 307 Active
US8074599B2 Plasma uniformity control by gas diffuser curvature Electricity 245 Active
US7785672B2 Method of controlling the film properties of PECVD-deposited thin films Electricity 241 Active
US8173228B2 Particle reduction on surfaces of chemical vapor deposition processing apparatus Performing Operations; Transporting 120 Active
US7514936B2 Detection and suppression of electrical arcing Physics 48 Active
US7292045B2 Detection and suppression of electrical arcing Physics 34 Expired
US6355108B1 Film deposition using a finger type shadow frame Electricity 33 Expired
US7125758B2 Controlling the properties and uniformity of a silicon nitride film by controlling the film forming precursors Electricity 29 Expired
US7582515B2 Multi-junction solar cells and methods and apparatuses for forming the same Emerging Cross-Sectional Technologies 26 Active
US9382621B2 Ground return for plasma processes Electricity 22 Active
US8075690B2 Diffuser gravity support Chemistry; Metallurgy 20 Active
US7429410B2 Diffuser gravity support Chemistry; Metallurgy 17 Active
US8724064B2 Fringe field switching mode liquid crystal display device and method of fabricating the same Physics 17 Active
US8225496B2 Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminated Emerging Cross-Sectional Technologies 16 Active
US7902991B2 Frequency monitoring to detect plasma process abnormality Electricity 14 Active
US8795793B2 Gas diffusion shower head design for large area plasma enhanced chemical vapor deposition Electricity 12 Active
US8343592B2 Asymmetrical RF drive for electrode of plasma chamber Electricity 11 Active
US9269923B2 Barrier films for thin film encapsulation Electricity 10 Active
USD680946S1 Gas flow diffuser faceplate General 10 Active
US9449809B2 Interface adhesion improvement method Emerging Cross-Sectional Technologies 10 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.