Robin L. Tiner
61Patents
13h-index
46Co-inventors
84Inventor score
Filing activity: May 20, 1998 → Oct 19, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8083853B2 | Plasma uniformity control by gas diffuser hole design | Emerging Cross-Sectional Technologies | 722 | Expired |
| US8721791B2 | Showerhead support structure for improved gas flow | Electricity | 485 | Active |
| USD784276S1 | Susceptor assembly | General | 310 | Active |
| US8074599B2 | Plasma uniformity control by gas diffuser curvature | Electricity | 245 | Active |
| US8992723B2 | RF bus and RF return bus for plasma chamber electrode | Electricity | 159 | Active |
| US6213704A | Method and apparatus for substrate transfer and processing | Emerging Cross-Sectional Technologies | 95 | Expired |
| US6517303B1 | Substrate transfer shuttle | Emerging Cross-Sectional Technologies | 36 | Expired |
| US9382621B2 | Ground return for plasma processes | Electricity | 22 | Active |
| USD701329S1 | Substrate support | General | 20 | Active |
| US8075690B2 | Diffuser gravity support | Chemistry; Metallurgy | 20 | Active |
| USD664249S1 | Flow blocker plate | General | 19 | Active |
| US7429410B2 | Diffuser gravity support | Chemistry; Metallurgy | 17 | Active |
| US6746198B2 | Substrate transfer shuttle | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7534301B2 | RF grounding of cathode in process chamber | Electricity | 10 | Expired |
| USD680946S1 | Gas flow diffuser faceplate | General | 10 | Active |
| USD675172S1 | Substrate support | General | 8 | Active |
| USD640715S1 | Lift pin assembly | General | 7 | Expired |
| USD635597S1 | Lift pin | General | 6 | Expired |
| USD650818S1 | Inner lift pin | General | 6 | Expired |
| USD713200S1 | Susceptor with heater | General | 5 | Active |
| US9068262B2 | Tightly fitted ceramic insulator on large area electrode | Emerging Cross-Sectional Technologies | 4 | Active |
| US9200368B2 | Plasma uniformity control by gas diffuser hole design | Emerging Cross-Sectional Technologies | 4 | Active |
| USD608743S1 | Shadow frame | General | 3 | Expired |
| US8281739B2 | RF shutter | Electricity | 3 | Active |
| US8733279B2 | PECVD process chamber backing plate reinforcement | Electricity | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.