Systems and methods for integrating load locks into a factory interface footprint space

US12159796B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Jacob Newman · Palo Alto, US
• Andrew J. Constant · Cupertino, US
• Michael R. Rice · Pleasanton, US
• Paul B. Reuter · Austin, US
• Shay Assaf · Santa Clara, US
• Sushant S. Koshti · Sunnyvale, US

Key dates

• Filing date: Feb 9, 2023
• Grant date: Dec 3, 2024
• Expiry date: Feb 9, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/67727
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Devices, systems, and methods for integrating load locks into a factory interface footprint space. A factory interface for an electronic device manufacturing system can include an interior volume defined by a bottom, a top and a plurality of sides, a load lock disposed within the interior volume of the factory interface, and a factory interface robot disposed within the interior volume of the factory interface, wherein the factory interface robot is configured to transfer substrates between a set of substrate carriers and the load lock.