Shortened load port for factory interface

US12159802B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Srinivas Poshatrahalli Gopalakrishna · Kanchinakote, IN
• Paul B. Reuter · Austin, US
• Devendra Channappa Holeyannavar · Bengaluru, IN
• Douglas B. Baumgarten · Round Rock, US
• Sushant S. Koshti · Sunnyvale, US
• Arunkumar Ramachandraiah · Savanuru, IN
• Narayanan Ramachandran · Bolingbrook, US

Key dates

• Filing date: Mar 1, 2022
• Grant date: Dec 3, 2024
• Expiry date: Mar 1, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G05B2219/40066
• WIPO field: Control
• WIPO sector: Instruments

Abstract

The disclosure describes devices, systems, and methods for integrating load locks into a factory interface footprint space. A factory interface for an electronic device manufacturing system can include a load port for receiving a substrate carrier. The load port can include a frame adapted for connecting the load port to a factory interface, the frame comprising a transport opening through which one or more substrates are capable of being transported between the substrate carrier and the factory interface. The load port can also include an actuator coupled to the frame, and a load port door coupled to the actuator and configured to seal the transport opening. The frame height can be greater than the height of the load port door, and less than 2.5 times the height of the load port door.