Compact low angle ion beam extraction assembly and processing apparatus
US12191117B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 17, 2021 |
| Grant date | Jan 7, 2025 |
| Priority date | — |
| Expiry date | Mar 1, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32422
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An extraction assembly may include an extraction plate for placement along a side of a plasma chamber, and having an extraction aperture, elongated along a first direction, and having an aperture height, extending along a second direction, perpendicular to the first direction. The extraction plate defines an inner surface along the extraction aperture, lying in a first plane. A beam blocker is disposed over the extraction aperture, and has an outer surface, disposed in a second plane, different than the first plane. As such, the beam blocker overlaps with the extraction plate along a first edge of the extraction aperture by a first overlap distance, and overlaps with the extraction plate along a second edge of the extraction aperture by a second overlap distance, so as to define a first extraction slit, along the first edge, and a second extraction slit along the second edge.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.