Sensor data compression in a plasma tool
US12217940B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 10, 2021 |
| Grant date | Feb 4, 2025 |
| Priority date | — |
| Expiry date | May 10, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03M7/6023
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Systems and methods for compressing data are described. One of the methods includes receiving a plurality of measurement signals from one or more sensors coupled to a radio frequency (RF) transmission path of a plasma tool. The RF transmission path is from an output of an RF generator to an electrode of a plasma chamber. The method includes converting the plurality of measurement signals from an analog form to a digital form to sample data and processing the data to reduce an amount of the data. The amount of the data is compressed to output compressed data. The method includes sending the compressed data to a controller for controlling the plasma tool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.