Systems and methods for measurement of misregistration and amelioration thereof

US12222199B2 · kind B2 · utility

Assignee

• KLA Corporation · US

Inventors

• Roie Volkovich · Migdal HaEmek, IL
• Nachshon Rothman · Oshrat, IL
• Yossi Simon · Kiryat Bialik, IL
• Anna Golotsvan · Rekhasim, IL
• Vladimir Levinski · Milpitas, US
• Nireekshan K. Reddy · Tel Aviv-Yafo, IL
• Amnon Manassen · Haifa, IL
• Daria Negri · Nesher, IL
• Yuri Paskover · Or Akiva, IL

Key dates

• Filing date: Nov 5, 2020
• Grant date: Feb 11, 2025
• Expiry date: Jan 13, 2043

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L22/12
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A system for use with a misregistration metrology tool (MMT), the system including a database including a plurality of process variation (PV) categories and a corresponding plurality of parameter sets and a process variation accommodation engine (PVAE) including a measurement site process variation category associator (MSPVCA) operative to associate a measurement site being measured by the MMT, at least partially based on an MMT output relating to the measurement site, with a measurement site process variation category (MSPVC), the MSPVC being one of the plurality of PV categories, a measurement site parameter set retriever (MSPSR) operative to retrieve a measurement site parameter set (MSPS) corresponding to the MSPVC and a measurement site parameter set communicator (MSPSC) operative to communicate the MSPS to the MMT.