Non-elastomeric, non-polymeric, non-metallic membrane valves for semiconductor processing equipment
US12253190B2 · kind B2 · utility
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21References
20Claims
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Key dates
| Filing date | Oct 18, 2023 |
| Grant date | Mar 18, 2025 |
| Priority date | — |
| Expiry date | Oct 18, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67017
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Non-elastomeric, non-polymeric, non-metallic membrane valves for use in high-vacuum applications are disclosed. Such valves are functional even when the fluid-control side of the valve is exposed to a sub-atmospheric pressure field which may generally act to collapse/seal traditional elastomeric membrane valves.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.