Protection system for switches in direct drive circuits of substrate processing systems
US12261029B2 · kind B2 · utility
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24Claims
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Key dates
| Filing date | Jun 10, 2021 |
| Grant date | Mar 25, 2025 |
| Priority date | — |
| Expiry date | Aug 10, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02B70/10
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A direct drive system for providing RF power to a component of a substrate processing system includes a direct drive circuit including a switch and configured to supply RF power to the component. A switch protection module is configured to monitor a load current and a load voltage in a processing chamber, calculate load resistance based on the load current and the load voltage, compare the load resistance to a first predetermined load resistance, and adjust at least one of an RF power limit and an RF current limit of the direct drive circuit based on the comparison.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.