Patent · US Active

Memory arrays comprising strings of memory cells and methods used in forming a memory array comprising strings of memory cells

US12322443B2 · kind B2 · utility

0Cited by
2References
41Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 28, 2022
Grant dateJun 3, 2025
Priority date
Expiry dateOct 4, 2043

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10B43/35
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A method used in forming a memory array comprising strings of memory cells comprises forming memory block regions individually comprising a vertical stack comprising alternating insulative tiers and conductive tiers. Channel-material strings extend through the insulative tiers and the conductive tiers. The conductive tiers individually comprise a void-space extending laterally-across individual of the memory-block regions. At least one of conductive or semiconductive material is formed in the void-space laterally-outward of individual of the channel-material strings. Conductive molybdenum-containing metal material is formed in the void-space directly against the at least one of the conductive or the semiconductive material and a conductive line comprising the conductive molybdenum-containing metal material is formed therefrom. The at least one of the conductive or the semiconductive material is of different composition from that of the conductive molybdenum-containing metal material. Other embodiments, including structure independent of method, are disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.