Patent · US Active

System for automatic diagnostics and monitoring of semiconductor defect die screening performance through overlay of defect and electrical test data

US12332182B2 · kind B2 · utility

0Cited by

11References

42Claims

0Family size

Assignee

KLA Corporation · US

Inventors

David W. Price · Austin, US
Robert J. Rathert · Mechanicsville, US
Chet V. Lenox · Venus, US
Oreste Donzella · San Ramon, US
Justin Lach · Portage, US
John Robinson · Austin, US

Key dates

Filing date	Apr 28, 2022
Grant date	Jun 17, 2025
Priority date	—
Expiry date	Oct 13, 2043

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/8854
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Systems and methods for determining a diagnosis of a screening system are disclosed. Such systems and methods include identifying defect results based on inline characterization tool data, identifying electrical test results based on electrical test data, generating one or more correlation metrics based on the defect results and the electrical test results, and determining at least one diagnosis of the screening system based on the one or more correlation metrics, the diagnosis corresponding to a performance of the screening system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.