Tunable temperature controlled substrate support assembly
US12334385B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 30, 2024 |
| Grant date | Jun 17, 2025 |
| Priority date | — |
| Expiry date | May 30, 2044 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/02
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Implementations described herein provide a substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a heating assembly. The substrate support assembly comprises a body having a substrate support surface and a lower surface, one or more main resistive heaters disposed in the body, a plurality of spatially tunable heaters disposed in the body, and a spatially tunable heater controller coupled to the plurality of spatially tunable heaters, the spatially tunable heater controller configured to independently control an output one of the plurality of spatially tunable heaters relative to another of the plurality of spatially tunable heaters.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.