Endpoint detection system for enhanced spectral data collection
US12385803B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 2024 |
| Grant date | Aug 12, 2025 |
| Priority date | — |
| Expiry date | Mar 25, 2044 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B6/4246
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An endpoint detection system for enhanced spectral data collection is provided. An optical bundle is coupled to a light source. The optical bundle includes an emitting optical fiber and a receiving optical fiber disposed at a pairing angle relative to the emitting optical fiber. The optical bundle is coupled to a collimator assembly that receives a light beam of incident light from the emitting optical fiber and directs spectral components of the light beam to first and second portions of a substrate surface. The collimator collects reflected spectral components produced by the spectral components directed to the substrate surface. The collimator assembly transmits the reflected spectral components to the receiving fiber, which transmits the reflected spectral components to a light detection component. A processing device coupled to the light detection component determines a reflectance of the substrate surface based on the reflected spectral components.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.