Metrology systems, coherence scrambler illumination sources and methods thereof
US12393046B2 · kind B2 · utility
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6References
15Claims
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Key dates
| Filing date | Sep 15, 2020 |
| Grant date | Aug 19, 2025 |
| Priority date | — |
| Expiry date | Oct 15, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/7065
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A system includes a radiation source and a phased array. The phased array includes optical elements, waveguides and phase modulators. The phased array generates a beam of radiation. The optical elements radiate radiation waves. The waveguides guide radiation from the radiation source to the optical elements. The phase modulators adjust phases of the radiation waves such that the radiation waves accumulate to form the beam. An amount of incoherence of the beam is based on randomization of the phases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.