Substrate susceptor using edge purging
US12406871B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 29, 2022 |
| Grant date | Sep 2, 2025 |
| Priority date | — |
| Expiry date | Dec 28, 2043 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68785
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A workpiece susceptor body can include a front face configured to support a workpiece, a back face opposite the front face, a workpiece contact zone at least partially forming a support boundary on an inner portion of the front face, and a plurality of axial channels disposed within the susceptor body. The workpiece contact zone can be disposed radially inward of an outer edge of a workpiece positioned on the front face in a processing configuration. Each of the plurality of axial channels may connect to corresponding openings extending into an outer portion of the front face. Each of the openings may be disposed radially outward of the workpiece contact zone of the susceptor body.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.