Patent · US Active

MEMS sensor with particle filter and method for producing it

US12415719B2 · kind B2 · utility

0Cited by

3References

19Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Andre Brockmeier · Villach, AT
Barbara Angela Glanzer · Klagenfurt, AT
Marten Oldsen · Kleve, DE
Francesco Solazzi · Villach, AT
Carsten von Koblinski · Velden am Wörther See, AT

Key dates

Filing date	Jul 15, 2021
Grant date	Sep 16, 2025
Priority date	—
Expiry date	Dec 19, 2043

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2201/003
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

The semiconductor device includes a microelectromechanical system (MEMS) chip having a first main surface and a second main surface situated opposite the first main surface, a first glass-based substrate, on which the MEMS chip is arranged by its first main surface, and a second substrate, which is arranged on the second main surface of the MEMS chip, wherein the MEMS chip has a first recess connected to the surroundings by way of a plurality of perforation holes arranged in the first substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.