Plasma-resistant polymeric material, preparation thereof, and use thereof
US4782008A · kind A · utility
25Cited by
15References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 19, 1985 |
| Grant date | Nov 1, 1988 |
| Priority date | — |
| Expiry date | Mar 19, 2005 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/265
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Plasma-resistant polymeric materials are prepared by reacting a polymeric material containing reactive hydrogen functional groups with a multifunctional organometallic material containing at least two functional groups which are reactive with the reactive hydrogen functional groups of the polymeric material, such as hexamethylcyclotrisilazane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.