Transfer apparatus for plate-like member
US4941800A · kind A · utility
3Cited by
9References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 21, 1988 |
| Grant date | Jul 17, 1990 |
| Priority date | — |
| Expiry date | Oct 21, 2008 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6838
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A transfer apparatus for carrying a semiconductor wafer into a wafer cassette comprising an arm to load a semiconductor wafer thereon, a moving mechanism to move the arm to a wafer cassette, a chucking device to have a wafer attracted to the arm, and an auxiliary mechanism to push a wafer and adjust the position of the wafer to the inlet of a wafer cassette when the wafer comes into contact with the side wall of the wafer cassette.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.