Plasma-resistant polymeric material, preparation thereof, and use thereof
US4981909A · kind A · utility
9Cited by
17References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 7, 1988 |
| Grant date | Jan 1, 1991 |
| Priority date | — |
| Expiry date | Sep 7, 2008 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/265
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Plasma-resistant polymeric materials are prepared by reacting a polymeric material containing reactive hydrogen functional groups with a multifunctional organometallic material containing at least two functional groups which are reactive with the reactive hydrogen functional groups of the polymeric material, such as hexamethylcyclotrisilazane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.