Window for microwave plasma processing device
US5234526A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 24, 1991 |
| Grant date | Aug 10, 1993 |
| Priority date | — |
| Expiry date | May 24, 2011 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32192
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A microwave transmitting window for a plasma processing device. The window is a body of one or more pieces of the same or different dielectric materials. A surface of the window facing a microwave transmitting horn or waveguide is planar and extends perpendicularly to an axial direction. An opposite surface of the window is recessed such that the body has a non-uniform thickness between the two surfaces. The recessed surface can have various shapes and the overall size of the window can be equal to the size of a plasma formation chamber of the plasma processing device. The outlet of the plasma formation chamber can be formed in an end wall or the outlet can be formed by the inner periphery of the plasma formation chamber.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.