Top coat for acid catalyzed resists
US5240812A · kind A · utility
20Cited by
5References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 18, 1991 |
| Grant date | Aug 31, 1993 |
| Priority date | — |
| Expiry date | Nov 18, 2011 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/092
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A protective material for use as an overcoating film for acid catalyzed resist compositions comprising a polymeric film forming compound, the films of which are impermeable to vapors of organic and inorganic bases.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.